ECS-2100SC

الوصف

• Capacity:**0LPM~**0LPM可客製化設計提出
• User friendly interface.Intelligent electronic control system
• Intelligent on-line troubleshooting system
• High Powder capture efficiency
• Operation temperature **0°C for effective waste-gas treatment
• Water saving function
• Ventrui’s tube design
• N2 flash arrester，keep safety
• Installation of remove moisture
• Cost effective.Low cost and Lowest cost of operation.
• Flexible customer design service
• Larger capacity could apply to process with heavy H2or SiH4
• Ultra precision safety mechanism with on-line signal points furnished at critical locations within the plant.
• Humanized design of machine operation for the protection of relevant operators as well as for safety and convenience.
• Patented water curtain reaction chamber enabling prevention against clogging and erosion in the chamber by the power dust.
• Minimum footprint and height.
• Simple disassembly of key parts ensures high maintenance performance.
• Option：Exhaust Blower、Extension LCD Monitor Controller、Auto By Pass System ã€Preheat Gun、Heating Jacket、Special air currents increase heat transmission, accelerating the gas abatement rate.PH Meter System 、  è‡ªå‹•åŠ è—¥è¨­è¨ˆã€ä¸­å¤®ç›£æŽ§ç³»çµ±ã€æ°£é«”偵測器
• 適用於半導體CVD,Etch,Diffusion等製程