الوصف

A cryopump is a vacuum pump that uses a low temperature surface to condense gas, also known as a condensate pump. The cryopump can obtain a clean vacuum with the highest pumping rate and the lowest ultimate pressure. It is widely used in the research and production of semiconductors and integrated circuits, as well as molecular beam research, vacuum coating equipment, vacuum surface analysis instruments, ion implanters and space simulation devices, etc. aspect.