Specifications:

• Scan area: *0x*0x*5 μm

• Scanner Type: XYZ stage
• Resonant frequency XY - 1 kHz
• Resonant frequency Z - *0 kHz
• Nonlinearity  <0.1%
• Availability of optical interference sensors
• Range of manual sample positioning: 5Ñ…5mm
• The accuracy of manual sample positioning: 5 um
• AFM spatial resolution (XY, lateral) <0.1 nm
• AFM spatial resolution (Z, vertical)         <0.*1 nm

Over *0 SPM modes realized: 

• Contact modes: measurement of normal forces, lateral forces, topography (feedback error), force curves
• Tapping modes: non-contact and semi-contact methods, topography (feedback error)
• Phase contrast
• Jumping Mode
• measurement of surface potentials
• Scanning Kelvin probe
• Spreading resistance
• Magnetic and electrical force microscopy