الوصف

In PV industry, PECVD equipment is mainly used for making anti-reflective layer on silicon piece. it also can be used for depositing silicon oxide and silicon nitride layers.
Here are some of the advantages of the equipment,
Larger throughput with lower unit cost;
Highly automatic;
High precisive temperature control;
Soft landing conveying structure;
Pressure monitor system;
Reliable performances of key parts.