Four Grades of
Ultra-pure Etchant/Cleanout
Fluid/Stripper/Developer
   UPSS GradeÂ
Single Metal Impurity less than 0.1ppb                Â
The same level as SEMI Grade 4 Â Â Â Â Â Â Â Â Â Â Â Â Â Â Â Â
Filter 0.2 micron particles     UPS
Grade Single Metal Impurity less than 1ppb                Â
The same level as SEMI Grade 3 Â Â Â Â Â Â Â Â Â Â Â Â Â Â Â Â
Filter 0.2 micron particles     UP
Grade  Single Metal Impurity less than
*0ppb          Â
      The same level as SEMI
Grade 2 Â Â Â Â Â Â Â Â Â Â Â Â Â Â Â Â
Filter 0.2 micron particles     EL
Grade   Single Metal Impurity less than
**0ppb                 Â
The same level as SEMI Grade 1 Â Â Â Â Â Â Â Â Â Â Â Â Â Â Â Â Â
Filter 0.2 micron particles
Â
