AIS2300

Description

AIS***0 excels in versatility and flexibility by combining high performance in all SEM modes & Particle counter with ease of operation in a multi-user material research environment. This instrument features a perfect balance between stable configuration and an excellent resolution. Angstrom-SEM clearly shows Angstrom�s state-of-art technology. Its rock-solid reliability and fully automated control functions provide customer with the maximum analytical capability. Angstrom-SEM pursues compact SEM design which is great for office environment. Angstrom-SEM provides high scan speed and pixel resolution and high performance control driver with new PCI board. A full set of automated image adjustment functions make it easy for new users to quickly acquire crisp, noise-free images. Even experienced users will benefit from the automated contrast, brightness and focus.

High Performance

• Field proven image quality
• Upgraded scan speed and pixel resolution.
• Wide variety of optional instrument
• Resolution : 3.0 nm
• Magnification : ~1,**0,**0X
• Display : Photo ***6X ***6
• Search : **0X**0 *0fps
• Options : BSE / WDS / EDS / EBSD / Etc.

Gun Coumn

• Gun design for stable current supply
• Dual field objective lens for spherical
• Aberration reduction
• Movable aperture for beam centering
• Upgraded design of magnetic lens (CL/OL)

Chamber & Stage

• 5 axis eucentric stage
• Option: Stage motorization
• EDS,WDS,CCD, Manipulator etc
• *0X*0X*7mm

Detector

• ET-bar type SE detector
• SE & BSE double image mode
• Option: BSE detector

GUI

• Window based GUI
• PC controlled operation
• Image thumbnail & storage
• Parameter Display

Vacuum System

• Automatic & Manual control
• Automatic Safety System
• R.P+D.P/ R.P+TMP

Image Analyzer

• Data transfer to Excel
• Particle counter for blob analysis
• Multi-focusing & Tiling
• 3D data view etc