Description

Features: 

(1) each slot can  clean 2 baskets at the same time. The device has the advantages of beautiful appearance, acid good performance, convenient operation, reliable operation, is the idal silicon cleaning equipment in semiconductor production line.

(2) the device is composed of machine frame part, thepart, body part, servo system, and a mechanical transmission part, electrical control system.

(3) process can be automatic / manual, mechanical hand is converted by PLC  control among the grooves, USA imported guide rail and the manipulator to meet the processs equence.

(4) except that loading and fetching  needs manual operation,other craft movement is achieved by mechanical hand,suitable for continuous production.

(5) the machine with high efficiency filters  meets demands of  cleaning work area (***0 ~**0 level, the *0 level for thetop grade).

(6) the man-machine interface touch screen with safety protection fault code, fault alarm,  and process number is for convenient operation and easy maintenance.