Description
System Benefits
ï¬ engineers have experience in the production of
ï¬ majority of components selected domestic and international
well-known manufacturers of products, with the international
advanced level
ï¬ design reflects years of progressive experience Zhenhua vacuum
obtained
ï¬ basic design conception is simple, compact, good health
guarantee vacuum
ï¬ large area coating, DC sputtered metal technology leader in the
domestic counterparts
ï¬ patriarch with a recognized expert in the line switch board
valve structure, with a very low failure rate
ï¬ use newly developed rotary target upgraded with high efficiency
and service life
ï¬ easy maintenance of full vacuum chamber door
ï¬ unique automatic car back rack, beautiful, clean, reduce space
requirements for cleanup
ï¬ straight cold cathode, special welding techniques and quick
change of the target and shield
ï¬ advanced control circuits and computer software automation
ï¬ molecular pump, pump synthetic high-quality pre-exhaust system
to ensure that the process chamber ultimate vacuum up to 5 *
*0E*4Pa.
ï¬ modular design of the vacuum chamber, to facilitate exchange
and accessibility, to ensure the reliability of the equipment,, but
also conducive to the future upgrading of equipment