Description
The sensing element is comprised of a sensing chip and an
integrated heater
formed on a silicon substrate using MEMS technology, and a
metal-oxide
semiconductor layer formed on the sensing chip. The device is
housed in a
surface-mount ceramic package. Due to miniaturization of the
sensing chip,
TGS ***0 requires a heater power consumption of only *5mW, and is
suitable
for low-power equipment and battery-operated instruments. In the
presence of
detectable gas, sensor conductivity increases depending on gas
concentration
in the air. A simple electrical circuit can convert the change in
conductivity to
an output signal which corresponds to the gas concentration.
The TGS ***0 has high sensitivity to low concentrations of gaseous
air
contaminants such as cigarette smoke and cooking odors. By
utilizing the
change ratio of sensor resistance from the resistance in clean air
as relative
response, human perception of air contaminants can be simulated and
practical
air quality control can be achieved.
