Description

Graphite boat used in PECVD of solar cell production line
The production of solar cells requires six major processes: texturing, diffusion, etching, coating, screen printing and sintering. In the manufacturing of solar cells, the PECVD tube coating process uses a graphite boat as the working body. The coating process uses plasma enhanced chemical vapor deposition to deposit a silicon nitride film on the front of the silicon wafer to reduce sunlight reflection and the surface of the silicon wafer.
PECVD is one of a critical process of solar cell production . Itll direct impact on the cells coating uniformity, color and appearance of the finished product. The graphite boat made of high quality raw material. High mechanical strength and high purity coupled with a dense material structure that allows only minimum erosion by plasma are the key requirements. Normally the graphite carrier can be supplied with a high level of surface finish, flatness or a defined surface roughness.
Product advantages:
1.Used the elimination of the "color " production technology, the production of long-term technology does not produce a "color"
2.Made of high purity graphite material, low impurity content, high strength
3.Ceramic assembly using *9.9% ceramic, anti-corrosion performance is strong, not easy to burst
4.Used precision machining equipment, hired a senior technical personnel, to ensure the accuracy of each of the parts