الوصف

1. Feature
*This equipment is for research.
*Designed to coat chemical regularly when studying of
  semi-conduct wafer, sapphire and display.
*Easy to operate for anyone

2. Description

1)ASC***0
Substrate size: Pieces~max Ø6" **0mm
Spin speed: *0~***0rpm
Spin acceleration: ~****0rpm/sec, max<5%
Spin motor: BLDC Spin Motor
Dimension : **3W x **3D x **8H
Spin bowl:  Ø **0 HDPE Bottom & Cover
Display: 7" LCD Touch screen
Program: PLC, *0 Recipes/*0 steps
Vaccum pump: Oil-less Vaccum pump
Power **0VAC, 5A


2) ASC***0A
Substrate size: Pieces~max Ø8" **0mm
Spin speed: *0~***0rpm
Spin acceleration: ~****0rpm/sec, max<5%
Spin motor: AC Servo Spin Motor
Dimension : **3W x **3D x **8H
Spin bowl: Ø **0 HDPE Bottom & Top cup
Display: 7" LCD Touch screen
Program: PLC, *0 Recipes/*0 steps
Vaccum pump: Oil-less Vaccum pump
Power **0VAC, 5A