الوصف

Function:
The equipment is a professional decorative coating, electronic products feature film production equipment, such as the main features include: fast high vacuum extraction system,
Shaft rotating substrate, directional rectangular magnetron sputtering target at low temperature, PLC + HMI vacuum automatic/manual control, water circulation and water protection system
 The main technical indicators
Vacuum chamber phi ***0 mm x H***0mm; Vertical cylindrical open structure before **4 stainless steel
Vacuum system KT - **0 diffusion pump + Japanese ulvac roots pump group system, the "two low" high compound vacuum gauge display;
    
acuum extreme limit vacuum: 5 x ***4 pa (with the exception of gas); *2 hours after vacuum leak rate: less than or equal to *0 Pa;
Pumping speed pumping speed: from the atmosphere to 3 x ***3 pa *0 minutes or less (except diffusion pump preheating)
Workpiece rotate work-piece frame: magnetic liquid seal, tooth disc *6 public/rotation axis, hang lever for the rack can be layered system;
Workpiece plane revolution speed: ***0 RPM adjustable, adjustable speed;
Negative bias power supply: *0 kw - **0 - v power adjustable controlled (digital display) 1;
Twin column target and power twin column 2 for a total of four target, titanium tubular target material 4 root;
Two *0 kw intermediate frequency sputtering power
Target center column column arc arc target 1 arc power supply 5 kw **0 a 1
Coating uniformity hang lever height **0 mm direction consistent color
Equipment stability can be continuous and stable operation at least 7 days.
Control PLC + HMI man-machine interface vacuum automatic/manual control system and alarm protection system.
Water cooling water circulation and water circulation and water protection system to protect the system. The pump, target such as lack of water, through the pressure, and cut-off anomalies such as alarm and perform the corresponding protection measures;
With cooling circulation water machine a
Covers an area of the machine power: about *0 KW covers an area of about *2 (m2) (length * width)